Development of X-ray active matrix pixel sensors for detection of electrons in scanning transmission electron microscope

A method developed to produce an X-ray active matrix pixel sensor (XAMPS) is reported. Several problems had been encountered during the production, but solutions to all of them were found. We will present the design of the detector, justifying the choice of high resistivity silicon as the material for XAMPS. Production processing will be described with emphasis on encountered problems and their solutions. The detectors were produced and one of them was tested within the BNL scanning transmission electron microscope (STEM) for recording data.