Pure Chemical Reduction of Tin Oxides to Metallic Tin by Atmospheric Plasma to Improve Interconnection Reflow of Pb-free Solders

Tin alloys are widely used as solder for electronic interconnections. Tin solder surfaces tend to have tin oxides which need to be removed to improve the yield of interconnection reflow processes such as flip chip joining. Conventionally, a strong flux is employed to remove these oxides, however this process has the drawbacks of leaving flux residue which can cause underfill delamination or require a high-cost cleaning process. As solder bump volumes and bump-to-bump spacing decrease, these problems become more difficult to manage in manufacturing. We propose the use of Atmospheric Plasma to reduce these oxides from the bump surfaces to enable the use of very light fluxes, or no flux at all. This process has the advantages of plasma surface preparation without the cost and throughput penalty of vacuum plasma processes. Such a process can increase throughput and yield while reducing the cost. We describe an experiment in which tin foils were treated with a reducing-chemistry Atmospheric Plasma process and ...