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(Microsystem Technologies,13:1601-1606)Micro-ball lens array fabrication in photoresist using PTFE hydrophobic effect
(Microsystem Technologies,13:1601-1606)Micro-ball lens array fabrication in photoresist using PTFE hydrophobic effect
2007
R. F. Shyu
H. Yang
W. R. Tsai
J. C. Tsai
Keywords:
Hydrophobic effect
Nanotechnology
Photoresist
Microsystem
Materials science
Composite material
Fabrication
lens array
Correction
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