Preparation of Er:YbF3 Light Conversion Film and Its Effect of Substrate Temperature on Optical Properties

The light conversion film Er∶YbF3,which has not only the up-conversion property but also the down-conversion property,was successfully prepared on Si(100) substrat.The effect of substrate temperature on films structural and optical properties was further studied.The results showed that the film achieves combination of up-conversion and down-conversion.It can effectively convert ultraviolet light and near infrared light into 656 nm which is the best response range to amorphous silicon.With increasing temperature,the crystallinity of the films were improved,but when substrate temperature exceeds 500 ℃,the impurity phases are found in the films.These results showed that optical properties of films with 500 ℃ were optimal.Moreover,the light conversion Er∶YbF3 film may improve photoelectric conversion efficiency of amorphous silicon solar cell.