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A novel Ir/IrO2/Pt-PZT-Pt/IrO2/Ir capacitor for a highly reliable mega-scale FRAM
A novel Ir/IrO2/Pt-PZT-Pt/IrO2/Ir capacitor for a highly reliable mega-scale FRAM
2000
Dong-Jin Jung
Hyun-Ho Kim
Yoon-Jong Song
N. W. Jang
Bon-jae Koo
Sung-Yung Lee
Soonoh Park
Kinam Kim
Keywords:
Thin film
Capacitor
Electronic engineering
Electrical engineering
Mega-
Materials science
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