Microfabricated polydimethylsiloxane microfluidic system including micropump and microvalve for integrated biosensor

Abstract We present a microfluidic system with paraffin-actuated microvalves and a thermopneumatic-actuated micropump that are easily integrated on the same substrate using the same fabrication process. The fabrication process of this microfluidic system using polydimethylsiloxane (PDMS), indium tin oxide (ITO) and glass is relatively simple, and its performance is good for the application of the disposable lab-on-a-chip. A maximum pumping rate of about 2.0 μl/min was measured at a duty ratio of 5% and a frequency of 1 Hz. The flow cut-off powers for the microvalves with the channel depth of 220 μm, were 300 and 350 mW for valve seat diameters of 1.5 and 2.0 mm, respectively. The power for flow cut-off depends on the channel depth and the diameter of the valve seat in the microvalves.