Spatial distribution study of argon radio-frequency inductively coupled plasma in inverse hysteresis transition area

Abstract Parameters of radio-frequency (rf) inductively coupled plasma (ICP) have been investigated with Langmuir probe and optical emission spectrum (OES) in this paper. Through the observation results of OES, we can finally get that inverse hysteresis phenomenon would occur when the air pressure is 0.6 Pa. The mode of plasma is demonstrated based on OES while spatial distribution of electron temperature T e , plasma density n p and plasma potential V p at the same power and pressure in inverse hysteresis transition area could be assured with Langmuir probe. The experiment results indicate that even though T e , n p and V p distribute more homogeneously in both axial and radial direction at the stage of H mode than E mode, the result shows no great difference of the data in both H mode and E mode.