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Dynamics and EUV Emission of a Microsecond Capillary Discharge
Dynamics and EUV Emission of a Microsecond Capillary Discharge
2001
Sergey V. Zakharov
Larissa Juschkin
Vladimir G. Novikov
Hans-Joachim Kunze
P. Choi
Keywords:
Microsecond
Capillary action
Analytical chemistry
Extreme ultraviolet lithography
Chemistry
Correction
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