Ion acceleration in a scalable MEMS RF-structure for a compact linear accelerator

A new approach for a compact radio-frequency(rf) accelerator structure is presented. The idea is based on the Multiple Electrostatic Quadrupole Array Linear Accelerator (MEQALAC) structure that was first developed in the 1980s. The MEQALAC allowed scaling of rf-structure down to dimensions of centimeters while at the same time allowing for higher beam currents through parallel beamlets. Using micro-electro-mechanical systems (MEMS) for highly scalable fabrication, we reduce the critical dimension to the sub-millimeter regime, while massively scaling up the potential number of parallel beamlets. The technology is based on rf-acceleration components and electrostatic quadrupoles (ESQs) implemented in a silicon wafer based design where each beamlet passes through beam apertures in the wafer. The complete accelerator is then assembled by stacking these wafers. This approach allows fast and cheap batch fabrication of the components and flexibility in system design for different applications. For prototyping these technologies, the components have been fabricated using printed circuits board (PCboard, FR-4). In this paper, we present first proof of concept results of the major components: rf-acceleration and ESQ focusing. Ongoing developments on implementing components in silicon and scaling of the accelerator technology to high currents and beam energies will be discussed.