A process for the modification of a microstructure of an object

There is provided a method for surface modification and / or volume modification of a micro structure at and / or in the material of an object, described, wherein the microstructure is formed on and / or in the material of the object first, and then a volume contraction of the material to reduce the relative structural dimensions of the microstructure of the article is performed. Using the process according to the invention very fine microstructures are relatively simple and inexpensive realized.