Endpoint judgment method

The invention discloses an endpoint judgment method. The endpoint judgment method comprises the steps that the glow strength of reaction gas in a reaction chamber is detected through a detection module; the data obtained through the detection module are received and processed by using a data processing module, wherein in times of data processing, smoothing of the data is avoided; the data are displayed and analyzed through a display module after being processed. By the adoption of the endpoint judgment method, judging accuracy is improved, and thus the manufacturing process can be accurately controlled.