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Challenge to 0.13μm Device Patterning using KrF
Challenge to 0.13μm Device Patterning using KrF
1999
Insung Kim
Jung-Hyeon Lee
Joon-Soo Par
Dong-Ho Cha
Han-Ku Cho
Joo-Tae Moon
Sang In Lee
Keywords:
Nanotechnology
Lithography
Materials science
Optoelectronics
Correction
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