Optical characterisation of 2D InP-based photonic crystals fabricated by inductively coupled plasma etching

Two-dimensional photonic crystals (PCs) were fabricated in InP/GaInAsP waveguides by e-beam lithography and inductively coupled plasma etching. Transmission measurements through simple PC slabs, one-dimensional Fabry-Perot cavities and PC-based waveguides are reported showing clear improvements of the PC optical properties with respect to the results obtained by other etch methods.