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Optimization of actuator shapes for a wafer heating application
Optimization of actuator shapes for a wafer heating application
2018
D.W.M. Veldman
R.H.B. Fey
Hans Zwart
M.M.J. van de Wal
J.D.B.J van den Boom
H Henk Nijmeijer
Keywords:
Actuator
Wafer
Mechanical engineering
Materials science
Correction
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