Semiconductor nanomembranes for stacked and flexible photonics
2010
Crystalline semiconductor nanomembranes (NMs), which are transferable, stackable, bondable and
manufacturable, offer unprecedented opportunities for unique and novel device applications. We report here
nanophotonic devices based on stacked semiconductor NMs on Si, glass and flexible PET substrates. Photonic
crystal Fano resonance-based surface-normal optical filters and broadband reflectors have been demonstrated with
unique angle and polarization properties. Flexible photodetectors and solar cells have also been developed based on
the NM stacking processes. Such NM stacking process can lead to a paradigm shift on silicon photonic integration
and inorganic flexible photonics.
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