Study on a Microfabrication W-band Planar Meander-Line Slow-Wave Structure

Properties of a microfabricated W-band (75–110 GHz) meander slow-wave structures (SWS) for low-voltage tubes with sheet electron beam are studied by numerical simulation and cold-test measurement. The SWS was microfabricated following previously published protocol based on magnetron sputtering and laser ablation processes. Transmission and reflection losses of proposed SWS were measured experimentally and evaluated numerically. The experimental results are in good agreement with the numerical ones.