Mechanisms of layer growth during molecular beam epitaxy of semiconductor films

Abstract This paper reviews our present understanding of particular aspects of the surface processes involved in the growth of epitaxial semiconductor films by molecular beam epitaxy. Emphasis is placed on adatom migration and incorporation on GaAs (001) substrates during the growth of GaAs, a comparison with equivalent growth effects on (110) and (111)A oriented substrates, and the influence of mismatch and substrate orientation on growth mode and strain relaxation in the InAs/GaAs system. A brief indication of surface segregation behaviour is also included.