Design and testing of a IMS-cell detector (with MEMS technology)

We propose a compact design of a IMS-cell detector. The aim of this work is to study and testing an option of IMS-cell detector made with micro-fabrication technology, the detection mechanism relies on the mobility of ions inside a chamber. Our Microsystems has a channel where enter the gas to analyze continuously, in the first part of the channel gas is ionized (glow-discharge), the fluid continues its movement to the detection area where a series of condensers to which an electric field is applied to him to a tension forming that obtains deflection of the trajectory of ions according to its mobility. The device uses the detection model called cross-flow [1].