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Thermal Stability of Atomic Layer Deposition Al2O3 Thin Films
Thermal Stability of Atomic Layer Deposition Al2O3 Thin Films
2006
Lü Hong-Liang
Xu Min
Ding Shi-Jin
Ren Jie
Zhang Wei
Keywords:
Thin film
Atomic layer deposition
Materials science
Composite material
Thermal stability
Correction
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