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Properties of High κ Gate Dielectrics Gd_2O_3, Y_2O_3, and yttria stabilized ZrO 2 for Si
Properties of High κ Gate Dielectrics Gd_2O_3, Y_2O_3, and yttria stabilized ZrO 2 for Si
2001
J. Kwo
Minghwei Hong
Ahmet Refik Kortan
K.L. Queeney
Y. J. Chabal Opila
David A. Muller
Sung-Nee G. Chu
B. J. Sapjeta
J. P. Mannaerts
T. Boone
H. W. Krautter
James Joseph Krajewski
A.M. Sergent
J. M. Rosamilia
T. S. Lay
Keywords:
Physical chemistry
Yttria-stabilized zirconia
Materials science
Dielectric
Correction
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