W/WN/poly gate implementation for sub-130 nm vertical cell DRAM

In this paper, we present the implementation of W/WN/poly gates in a 135 nm sub-8F2 vertical cell DRAM technology with dual gate oxide planar support transistors. Key features include low sheet resistance wordlines, high performance peripheral logic circuitry and a scalable memory cell array. A process flow detailing the decoupling of the array and support regions of the DRAM to achieve planar support transistors with L/sub eff/(nFET)<140 nm is discussed.