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Peculiarity of Electric Properties of Oxygen Implanted Silicon at Early Precipitation Stages
Peculiarity of Electric Properties of Oxygen Implanted Silicon at Early Precipitation Stages
2019
Denis Danilov
Oleg Vyvenko
A. S. Loshachenko
N. A. Sobolev
Keywords:
Oxygen
Condensed matter physics
Precipitation
Physics
Silicon
Ion implantation
oxygen precipitates
Chemical physics
electric properties
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