Rapid Hybrid Chemical Vapor Deposition for Efficient and Hysteresis-Free Perovskite Solar Modules with Operation Lifetime Exceeding 800 Hours

Hybrid chemical vapor deposition (HCVD) has been employed in the fabrication of perovskite solar cells (PSCs) and modules (PSMs), and it shows strong promise for upscalable fabrication. The conventional HCVD process needs a relatively long processing time (e.g., several hours) and the fabricated PSCs often exhibit salient hysteresis, which impedes utilization of this technology for mass production. Herein, we demonstrate a rapid HCVD (RHCVD) fabrication process for PSCs using a rapid thermal process, which not only significantly reduces the deposition time to less than 10 min, but also effectively suppresses hysteresis. This markedly reduced deposition time is comparable to that of solution-coating processes. Furthermore, the shorter processing time inside the furnace reduces the exposure time of the glass/ITO/SnO2 substrates under vacuum, which helps maintain the high quality of the SnO2 electron-transport layer and results in a lower density of gap states. Finally, PSMs with a designated area of 22.4 cm2 fabricated via RHCVD achieved an efficiency of 12.3%, and maintained 90% of the initial value after operation under continuous light illumination for over 800 h.