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Structural and optical properties of Mg x Zn 1− x O thin films grown by metal-organic chemical vapor deposition
Structural and optical properties of Mg x Zn 1− x O thin films grown by metal-organic chemical vapor deposition
2004
Yuantao Zhang
Guo-tong Du
Dali Liu
Huichao Zhu
Yongguo Cui
Xin-fa Dong
Shuren Yang
Keywords:
Hybrid physical-chemical vapor deposition
Chemical vapor deposition
Thin film
Inorganic chemistry
Combustion chemical vapor deposition
Electron beam physical vapor deposition
Chemistry
Pulsed laser deposition
Carbon film
Plasma-enhanced chemical vapor deposition
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