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Growth of Highly -Oriented Crystalline Silicon Thin Films on Molybdenum by Pulsed DC Magnetron Sputtering
Growth of Highly -Oriented Crystalline Silicon Thin Films on Molybdenum by Pulsed DC Magnetron Sputtering
2003
P. Reinig
F. Fenske
A. Schöpke
B. Selle
W. Fuhs
M. Nerding
H.P. Strunk
Keywords:
Sputter deposition
Pulsed DC
Polycrystalline silicon
Thin film
Composite material
High-power impulse magnetron sputtering
Molybdenum
Crystalline silicon
Silicide
Metallurgy
Materials science
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