Condensation of monosilane-argon and monosilane-helium mixtures in free jets

Condensation of gaseous monosilane-argon and monosilane-helium mixtures was investigated in free jets by a Rayleigh scattering laser diagnostic technique. The condensation of a SiH4-Ar mixture begins to develop at a lower stagnation pressure and at a shorter distance from the nozzle, and proceeds at a higher rate, as compared to condensation in monosilane-helium and pure argon jets. The results of Rayleigh scattering measurements in condensing monosilane-argon jets scale with the parameter P0d0.8. An analysis of the results obtained in this study and found in literature suggests that simultaneous monosilane-argon condensation lead-ing to the formation of mixed clusters takes place in the monosilane-argon mixture.