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Growth Process and Morphological Characterization of Silicon Nanodots Integrated in Non-Volatiles Memories
Growth Process and Morphological Characterization of Silicon Nanodots Integrated in Non-Volatiles Memories
2011
Julien Amouroux
Vincenzo Della Marca
Philippe Boivin
Philippe Maillot
Christophe Muller
Damien Deleruyelle
Eric Jalaguier
J. P. Colonna
Keywords:
Nanodot
Nanotechnology
Materials science
Silicon
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