Piezoelectric element, a method of manufacturing the same, and a touch panel device
2003
A piezoelectric element (X), the substrate (11), a piezoelectric film (12), the first electrode (13), and a second electrode (14), the first electrode (13) and / or the second electrode (14) metal is interposed between the substrate (11) and the piezoelectric film (12), and, Ti, Cr, Ni, Cu, Zn, Pd, Ag, Hf, W, is selected from the group consisting of Pt, and Au of Al alloy containing 0.1~3Wt% of.
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