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Novel Patterning Technologies for Semiconductors, MEMS/NEMS, and MOEMS 2019
Novel Patterning Technologies for Semiconductors, MEMS/NEMS, and MOEMS 2019
2019
Martha I. Sanchez
Eric M. Panning
Keywords:
Nanotechnology
Nanoelectromechanical systems
Microelectromechanical systems
Materials science
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