Graphite boat for liquid phase epitaxy growth and liquid phase epitaxy growth method

2012 
The invention discloses a graphite boat for liquid phase epitaxy growth and a liquid phase epitaxy growth method. The graphite boat comprises a base support, a sliding strip, a mother liquid tank, graphite sheets and an upper cover. A plurality of substrate containing portions for containing a substrate is arranged on the sliding strip to enable the substrate to be capable of sliding in the base support in the vertical direction of the graphite boat with the sliding strip, the mother liquid tank is arranged above the sliding strip, a plurality of mother liquid containing portions for containing mother liquid are arranged in the mother liquid tank, and the mother liquid containing portions penetrate through the mother liquid tank and enable the substrate sliding to the below of the mother liquid tank to be completely contacted with the mother liquid by means of size. The graphite sheets are arranged in the mother liquid containing portions and cover mother liquid contained in the mother liquid containing portions. Material volatilizing speed in the mother liquid can be changed by changing the preset arrangement mode of the hole diameter of the graphite sheets.
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