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Dissolution Fundamentals of 193-nm Methacrylate Based Photoresists | NIST
Dissolution Fundamentals of 193-nm Methacrylate Based Photoresists | NIST
2006
Ashwin Rao
Shuhui Kang
Bryan D. Vogt
Vivek M. Prabhu
Eric K. Lin
Wen-Li Wu
Karen Turnquest
William D. Hinsberg
Keywords:
Optics
line edge roughness
Dissolution
Photoresist
Methacrylate
NIST
Reflectivity
Physics
Correction
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