Self-Lubricating, TiN-MoS 2 Composite Coatings Produced by Simultaneous Deposition from Ti((CH 3 ) 2 N) 4 /NH 3 /MoF 6 /H 2 S GAS Mixtures

Composite coatings consisting of discrete phases of TiN and MoS 2 were codeposited on graphite substrates from Ti((CH 3 ) 2 N) 4 /NH 3 /MoF 6 /H 2 S gas mixtures in a cold-wall reactor at 1073 K and 1.3 kPa. Chemical composition and microstructure of the coatings were characterized by Auger electron spectroscopy, X-ray diffraction, and transmission electron microscopy. Kinetic friction coefficients of the coatings were determined by a computer-controlled friction microprobe and values less than 0.2 were obtained with a type-440C stainless-steel counterface under ambient condition.