Novel film bulk acoustic resonator and production method thereof

The invention belongs to the radio frequency micro-electromechanical system technology field, to be specific, provides a novel film bulk acoustic resonator and a production method thereof. The film bulk acoustic resonator comprises a substrate; a bottom electrode, a piezoelectric layer, and a top electrode, which are sequentially disposed on the substrate. The substrate is provided with a groove, and a low acoustic impedance layer is disposed on the upper surface of the substrate and in the groove, and in addition, the bottom electrode, the piezoelectric layer, and the top electrode are disposed on the low acoustic impedance layer. The bottom electrode is the composite bottom electrode formed by sequentially arranging a high-conductivity electrode layer and a high acoustic impedance electrode layer in a laminated on the low acoustic impedance layer. The novel film bulk acoustic resonator and the production method thereof are advantageous in that the performance of the resonator is excellent, and the production technology difficulty and the complexity are greatly reduced; the production yield of the film bulk acoustic resonant is obviously improved, the production cost is greatly reduced, and the production period is shortened; the industrialized production is facilitated, and great meaning is provided for broadening the application field.