Electrical and magnetic properties of electrodeposited Fe-based alloys used for thin film transformer

Three electrodeposited Fe-Ni, Fe-Co, and Fe-Ni-Co cores of thin film transformer are prepared on silicon (1 0 0) substrates, which are sputtered a 90 nm thick film of Cu acting as the seed layer. The core films consisting of Fe-Ni 20:80, Fe-Co 60:40 and Fe-Ni-Co 10:60:30, respectively, are deposited using direct current electrodeposition. The surface texture, electrical and magnetic properties are surveyed by scanning electron microscopy (SEM), superconducting quantum interference device (SQUID), etc. The wave transmission ability and efficiency of thin film transformer with these cores, inputting the sine wave, are compared. All the analyses indicate that FeNi alloy films display the optimal magnetic properties and excellent transformer performance.