Z-direction sensitivity quartz vibration beam accelerometer chip and processing technology and accelerometer based on QoS technique

Z-direction sensitivity quartz vibration beam accelerometer chip and processing technology and accelerometer of the present invention offer based on QoS technique, chip includes the first, second quartz construction for being bonded in silicon substrate structure two sides, quartz construction includes quartzy frame, the fixed quartz tuning-fork of both-end, quartz supports beam and quartzy mass block, and silicon substrate structure includes silicon substrate frame and siliceous gauge block；It is bonded completely at quartzy frame and silicon substrate frame, and at quartzy mass block and siliceous gauge block, forms the sandwich formats of the first quartz construction, silicon substrate structure, the second quartz construction；Processing technology is first progress silicon substrate preliminary working, then carries out silicon substrate and two quartz plate double-sided bondings, and two quartz plates are thinned and polishing, then carries out the production of quartz vibration beam electrode and quartz construction, finally carries out the release of silicon substrate structure.The present invention has the characteristics that high sensitivity, at low cost.