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Metallic oxygen barrier diffusion applied to high-k deposition WODIM
Metallic oxygen barrier diffusion applied to high-k deposition WODIM
2010
Erwan Rauwel
Protima Rauwel
F. Ducroquet
I. Matko
A.A.C.S. Lourenço
Keywords:
Oxygen
High-κ dielectric
Inorganic chemistry
Metal
Chemistry
Chemical engineering
Deposition (law)
Materials science
oxygen barrier
Correction
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