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Full-Wafer Technology for Large-Scale Laser Fabrication and Testing : Micro/nanofabrication and Devices
Full-Wafer Technology for Large-Scale Laser Fabrication and Testing : Micro/nanofabrication and Devices
1992
Peter Buchmann
Melvin Kent Benedict
N. Cahoon
K. Datwyler
A. Mouser
H.K. Seitz
Peter Vettiger
Otto Voegeli
P. Wolf
Keywords:
Nanotechnology
Nanolithography
Fabrication
Laser
Wafer
Optoelectronics
Semiconductor laser theory
Materials science
ion beam processing
laser fabrication
Correction
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