Extraction of frequency dependent characteristic transmission line parameters up to 20 GHz for global wiring in 90 nm SOI/Cu technology

S-parameter measurements were performed on special test lines embedded in an 8 copper metal layer test chip in order to determine the propagation constant y(f) and the complex characteristic impedance Z/sub 0/(f). Measurement results are presented for signal lines in the 7/sup th/ metal layer showing very good agreement with FEM-simulations in the frequency range up to 20 GHz.