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High brightness ion source for focused ion beam based on VHF inductively coupled plasma
High brightness ion source for focused ion beam based on VHF inductively coupled plasma
2004
Yoon Jae Kim
Dong Hee Park
Yong-Seok Hwang
Keywords:
Ion gun
Ion beam
Inductively coupled plasma
Atomic physics
Focused ion beam
Secondary ion mass spectrometry
Analytical chemistry
Ion beam deposition
Liquid metal ion source
Ion source
Chemistry
Correction
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