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Modeling of the linear plasma device NAGDIS-II with neutral gas puffing and pumping by using EMC3-EIRENE
Modeling of the linear plasma device NAGDIS-II with neutral gas puffing and pumping by using EMC3-EIRENE
2017
Y Hayashi
N. Ohno
T. Kuwabara
H. Tanaka
G. Kawamura
Shin Kajita
T. Tsujihara
H. Ohshima
Mitsutoshi Aramaki
Y. Feng
Keywords:
Plasma
Analytical chemistry
Chemistry
Atomic physics
Materials science
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