Magnetron-sputtered metal-amorphous silicon interfaces☆

Abstract Large-area platinum and palladium Schottky barrier solar cells with diode quality factors approaching unity have been fabricated on magnetron-sputter-deposited hydrogenated amorphous silicon (a-Si:H). Measured optical band gaps and barrier heights are comparable with those obtained on glow-discharge-produced a-Si:H but open-circuit voltages are lower. High surface defect densities are suggested to be responsible for the decrease in V oc .