Old Web
English
Sign In
Acemap
>
Paper
>
Silicon MEMS probe for permittivity measurement
Silicon MEMS probe for permittivity measurement
2005
Jung-Mu Kim
Donghoon Oh
Jeiwon Cho
Youngwoo Kwon
Changyul Cheon
Yong-Kweon Kim
Keywords:
Nanotechnology
Permittivity
Electronic engineering
Microelectromechanical systems
Engineering
Silicon
Correction
Source
Cite
Save
Machine Reading By IdeaReader
2
References
0
Citations
NaN
KQI
[]