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Study on chemical-mechanical polishing of low dielectric constant polyimide thin films
Study on chemical-mechanical polishing of low dielectric constant polyimide thin films
2000
Yl Tai
Tsai
Ic Tung
Bt Dai
Feng
Keywords:
Thin film
Dielectric
Polyimide
Polymer chemistry
Chemical-mechanical planarization
Materials science
Composite material
Correction
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