Method of manufacturing a laminate and a method of manufacturing a device structure using it

A laminate of a polyimide film and the support for the base material for laminating the various devices, without peeling even in a high temperature process during device fabrication, yet easy after making a device on a polyimide film and to provide a laminate which can be peeled off the polyimide film from the support. Method for producing a laminate of the invention, a method for making at least the support 1 and the polyimide film 6 which consists consists laminate, as the polyimide film 6, a plasma treatment on the surface to be opposed at least to the support 1 using decorated with films, wherein the support 1 and the polyimide film 6 and is subjected to a coupling agent treatment on at least one of the opposing surfaces forming a coupling treatment layer 2, then a part of the coupling treatment layer 2 after forming a predetermined pattern by performing deactivation treatment, the support 1 and superposing the said polyimide film 6 is pressurized and heat-treated.