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RT-atomic layer deposition of aluminum silicate and its application to ion sorption
RT-atomic layer deposition of aluminum silicate and its application to ion sorption
2020
Yoshiharu Mori
Kentaro Saito
Kazuki Yoshida
Masanori Miura
Kesanku Kanomata
Bashir Ahmmad
Shigeru Kubota
Fumihiko Hirose
Keywords:
Atomic layer deposition
Materials science
Chemical engineering
Aluminum silicate
Ion
Sorption
Correction
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