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A 0.25 m CMOS technology with 45 NO-nitrided oxide
A 0.25 m CMOS technology with 45 NO-nitrided oxide
1995
Marie S. C. Luo
Paul V. G. Tsui
Wei-Ming Chen
Percy V. Gilbert
Bikas Maiti
A.R. Sitaram
Shih Wei Sun
Keywords:
Oxide
Nitriding
Ring oscillator
Short-channel effect
CMOS
Process integration
Electrical engineering
Materials science
Electronic engineering
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