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Etching Mechanism Behind the High-Speed Etching of Silicon in NH 2 OH-added Alkaline Solutions
Etching Mechanism Behind the High-Speed Etching of Silicon in NH 2 OH-added Alkaline Solutions
2020
Veerla Swarnalatha
Kanneri Thettiyappath Vismaya
Avvaru Venkata Narasimha Rao
Prem Pal
Ashok Kumar Pandey
Hiroshi Tanaka
Kazuo Sato
Keywords:
Etching
Silicon
Engineering
Chemical engineering
Analytical chemistry
Nanotechnology
Correction
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