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Preliminary study on the design of a new micromachined silicon strain sensor based on the Campaniform sensillum of insects
Preliminary study on the design of a new micromachined silicon strain sensor based on the Campaniform sensillum of insects
2003
Dhb Wickasono
WA van Duyl
Jfv Vincent
P.J. French
Keywords:
Sensillum
Optoelectronics
Campaniform sensilla
strain sensor
Materials science
Silicon
Correction
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