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Fabrication of electrically insulated microchannels in silicon (poster)
Fabrication of electrically insulated microchannels in silicon (poster)
2000
Jan Lichtenberg
G. Lämmel
M Oulevey
E. Verpoorte
Ph. Renaud
N. F. de Rooij
Keywords:
Fabrication
Electronic engineering
Materials science
Silicon
Nanotechnology
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