Fabrication of vertical and high-aspect-ratio glass microfluidic device by borosilicate glass molding to silicon structure

We propose a fabrication method of vertical and high-aspect-ratio microfluidic device which is made of borosilicate glass. Glass microfluidic devices have high demand because of its chemical stability, good bio compatibility, and high optical transparency. We realized vertical glass microwells of 25 µm in diameter and 50 µm in depth(aspect ratio: 2), and micropillars of 3 µm in diameter and 25 µm in height (aspect ratio: ≈ 8). We also realized microfluidic device with pillars in the microchannel.